Faculty Name: Dr. Shourya Dutta Gupta
Course Period: 01st Jan to 26th April 2024
Number of Credits: 3 credits
Course Contents: Lithography – Photolithography, E-beam lithography, Focussed ion beam lithography, Etching (Dry and wet etching techniques, selectivity, directionality), Deposition techniques (PVD (sputtering and evaporation) and CVD (PECVD, LPCVD, APCVD), Chemical planarization, Oxidation, Ion implantation and Diffusion (for doping)
What you'll learn: The main objective of this course is to familiarize the students to various nano- and micro-fabrication techniques used for the realization of various functional devices, with a special emphasis towards devices integrating semiconducting materials. This course will cover both the pattern generation and pattern transfer aspects of nanofabrication and the students will also learn how different process flows are developed. Finally, this course will also look at various case studies where the potential challenges and solutions have been achieved in order to realize high quality devices.
About the Instructor: Dr. Shourya Dutta Gupta is an associate professor in the Materials Science and Metallurgical Engineering department at IIT Hyderabad. His core area of interest is in the fields of plasmonics, nanophotonics, biosensing, and the development of advanced nanofabrication techniques. He has a B.Tech. in Metallurgical and Materials Engineering from IIT Kanpur and PhD from Swiss Federal Institute of Technology Lausanne. Prior to joining IIT Hyderabad, he was a Post-doctoral fellow at the University of Texas at Austin and Cornell University.
Instructor Profile
Familiarity with basics of materials science or solid state physics (bonding, properties of materials)